About R&D Center

We challenge ourselves for convergence
and new innovation across the entire organization.

About R&D Center

  • ALD material
    development

    Necessary for cutting-edge
    semiconductor manufacturing

  • Review and evaluation

    process review and material evaluation using the film-forming device

  • Measurement &
    Analysis

    Analysis using X-ray devices, etc. for Thin film analysis in nano-scale

  • We are developing state-of-the-art semiconductor ALD (Atomic Layer Deposition) / CVD (Chemical Vapor Deposition) materials. We are seeking to connect with Japan's ADEKA CORPORATION, and carry out development in cooperation with our customers.
    Focusing on High-k conductor materials for memory and logic semiconductors such as DRAM and NAND, it meets various
    required characteristics such as electrode materials and wiring materials, and through the development of film-forming materials, material evaluation, and film-forming evaluation technologies, we are constantly improving materials to develop next-generation materials.