Semiconductor Materials

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High Purity Etching Gas High Purity CVD New CVD

High Purity Etching Gas

Product Chemical formula Boiling point(℃)
ADEKA HIGH PURITY Cl₂ Cl₂ -34.1
ADEKA HIGH PURITY HBr HBr -66.7
ADEKA HIGH PURITY BCl₃ BCl₃ 12.5