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Semiconductor Materials

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High Purity Etching Gas High Purity CVD New CVD

New CVD

Product Chemical formula Boiling point(℃)
ADEKA SUPER TMA Al(CH3)₃ High-K
ADEKA ORCERA TDMAH Hf[N(CH3)2]₄
ADEKA SUPER TEMAH Hf[N(C2H5)(CH3)]₄
ADEKA SUPER TEMAZ Zr[N(C2H5)(CH3)]₄
ADEKA SUPER TDMAT Ti[N(CH3)2]₄
ADEKA SUPER OMCTS [OSi(CH3)2]₄ Low-k
ADEKA SUPER TMCTS [OSiH(CH3)]₄
ADEKA TDMAS HSI[N(CH3)2]₃